JPS60201611A - 可変容量コンデンサ - Google Patents

可変容量コンデンサ

Info

Publication number
JPS60201611A
JPS60201611A JP59059131A JP5913184A JPS60201611A JP S60201611 A JPS60201611 A JP S60201611A JP 59059131 A JP59059131 A JP 59059131A JP 5913184 A JP5913184 A JP 5913184A JP S60201611 A JPS60201611 A JP S60201611A
Authority
JP
Japan
Prior art keywords
movable electrode
frequency
electrode
capacitor
variable capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59059131A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0251244B2 (en]
Inventor
滝沢　照広
恒夫 鳥居
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Industry and Control Solutions Co Ltd
Original Assignee
Hitachi Engineering Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Engineering Co Ltd, Hitachi Ltd filed Critical Hitachi Engineering Co Ltd
Priority to JP59059131A priority Critical patent/JPS60201611A/ja
Publication of JPS60201611A publication Critical patent/JPS60201611A/ja
Publication of JPH0251244B2 publication Critical patent/JPH0251244B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
JP59059131A 1984-03-27 1984-03-27 可変容量コンデンサ Granted JPS60201611A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59059131A JPS60201611A (ja) 1984-03-27 1984-03-27 可変容量コンデンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59059131A JPS60201611A (ja) 1984-03-27 1984-03-27 可変容量コンデンサ

Publications (2)

Publication Number Publication Date
JPS60201611A true JPS60201611A (ja) 1985-10-12
JPH0251244B2 JPH0251244B2 (en]) 1990-11-06

Family

ID=13104445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59059131A Granted JPS60201611A (ja) 1984-03-27 1984-03-27 可変容量コンデンサ

Country Status (1)

Country Link
JP (1) JPS60201611A (en])

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012023167A (ja) * 2010-07-14 2012-02-02 Nagano Japan Radio Co 容量可変型コンデンサ、非接触電力伝送用アンテナ装置、送電装置、受電装置および非接触電力伝送システム
CN102959657A (zh) * 2010-06-28 2013-03-06 康姆艾德公司 真空可变电容器
KR20150013062A (ko) * 2013-07-25 2015-02-04 도쿄엘렉트론가부시키가이샤 플라즈마 처리 장치
WO2023139957A1 (ja) * 2022-01-18 2023-07-27 日新電機株式会社 アンテナ及びプラズマ処理装置

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102959657A (zh) * 2010-06-28 2013-03-06 康姆艾德公司 真空可变电容器
JP2013529852A (ja) * 2010-06-28 2013-07-22 コメット アクチェンゲゼルシャフト 真空可変コンデンサ
JP2012023167A (ja) * 2010-07-14 2012-02-02 Nagano Japan Radio Co 容量可変型コンデンサ、非接触電力伝送用アンテナ装置、送電装置、受電装置および非接触電力伝送システム
KR20150013062A (ko) * 2013-07-25 2015-02-04 도쿄엘렉트론가부시키가이샤 플라즈마 처리 장치
JP2015026475A (ja) * 2013-07-25 2015-02-05 東京エレクトロン株式会社 プラズマ処理装置
US9991096B2 (en) 2013-07-25 2018-06-05 Tokyo Electron Limited Plasma processing apparatus
TWI677010B (zh) * 2013-07-25 2019-11-11 日商東京威力科創股份有限公司 電漿處理裝置
TWI730370B (zh) * 2013-07-25 2021-06-11 日商東京威力科創股份有限公司 電漿處理裝置
WO2023139957A1 (ja) * 2022-01-18 2023-07-27 日新電機株式会社 アンテナ及びプラズマ処理装置
JP2023104552A (ja) * 2022-01-18 2023-07-28 日新電機株式会社 アンテナ及びプラズマ処理装置

Also Published As

Publication number Publication date
JPH0251244B2 (en]) 1990-11-06

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